Semiconductor Industry


   

Single Stage Pressure Regulator

Series AP 1000

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Features:
  • Hastelloy® alloy C-22® or SS 316L VAR secondary remelt construction
  • 15 µin. surface finish (10, 7 and 5 µin. optional)
  • Two Hastelloy C-22 internal options
  • Vacuum to 3500 psig (241 bar) inlet
  • Cleaned, assembled and packaged for high purity semiconductor applications
  • Flow rates—Standard to 30 SLPM (1 SCFM) HF option to 120 SLPM (4 SCFM)
  • Industry standard for point of use applications
Operating Parameters:
Source pressurevacuum to 3,500 psig (241 bar);
(AP 1001, 300 psig [21 bar] maximum)
Delivery pressure      AP 10011 to 10 psig (0.07 to 0.7 bar)
AP 1002
1 to 30 psig (0.07 to 2 bar)
AP 1006
2 to 60 psig (0.14 to 4 bar)
AP 1010
2 to 100 psig (0.14 to 7 bar)
AP 1015
5 to 150 psig (0.34 to 10 bar)
Proof pressure5,000 psig (345 bar)
Burst pressure10,000 psig (690 bar)

Other Parameters:
Inlet/outlet connectors1/4 or 3/8 inch face seal or tube weld
Bonnet port1/8 inch NPT
Flow coefficient(Cv) 0.09 (0.15 HF option)
Internal volume0.49 in3 (8 cm3)
Operating temperature-40° to +160°F (-40° to +71°C)
Surface finish15 µin. (0.4 µm) Ra max standard;
10 µin (0.25 µm); 7 µin (0.18 µm); and 5 µin (0.13 µm) optional
Inboard leakage2 x 10-10 sccs
Outboard leakage2 x 10-9 sccs He at 1500 psig inlet pressure
Leakage across seat4 x 10-8 sccs He at 1000 psig inlet pressure
Installationsurface or panel (optional)
Delivery pressure rise0.25 psig per 100 psig source pressure drop
HF
0.75 psig per 100 psig source pressure drop



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