Diaphragm Valves
Pressure Regulators
Absolute AP 1100
Springless Pressure Regulators
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Absolute Pressure Regulator
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Series AP 1100
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Features:
- Single stage
- Hastelloy® alloy C-22® or
SS 316L VAR secondary
remelt construction
- 15 µin. Ra max
surface finish
(10, 7 and 5 µin. opt)
- Only one nonmetallic
seal (PCTFE) in the
process stream
- Cleaned, assembled and
packaged for high purity
semiconductor
applications
- Flow rate to 500 sccm
- Vacuum to 300 psig
(21 bar) inlet,
100 torr to 10 psig
(.7 bar) outlet
Operating Parameters:
| Source pressure | | vacuum to 300 psig (21 bar) |
| Delivery pressure AP 1101 | | 100 mm Hg absolute to 10 psig |
| Proof pressure | | 500 psig (34 bar) |
| Burst pressure | | 8,000 psig (552 bar) |
Other Parameters:
| Inlet/outlet connectors | | 1/4 or 3/8 inch face seal or tube weld |
| Bonnet port | | 1/8 inch NPT |
| Flow coefficient | | (Cv) 0.05 |
| Internal volume | | 0.49 in3 (8 cm3) |
| Operating temperature | | -40° to +160°F (-40° to +71°C) |
| Surface finish | | 15 µin. (0.4 µm) Ra max standard;
10 µin (0.25 µm); 7 µin (0.18 µm); and 5 µin (0.13 µm) optional |
| Inboard leakage | | 2 x 10-10 sccs |
| Outboard leakage | | 2 x 10-9 sccs He at 300 psig inlet pressure |
| Leakage across seat | | 4 x 10-8 sccs He at 300 psig inlet pressure |
| Installation | | surface or panel (optional) |
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Biotechnology Industry
