Semiconductor Industry


   

Positive Shut-off Pressure Regulator

Series AP 1200
Series AP 1200

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Features:
  • Single stage
  • Stainless steel 316L VAR secondary remelt construction
  • Flow rates
    – standard to 800 slpm (28 scfm)
    – HF option to 1,000 slpm (35 scfm)
    – FC option to 1,500 slpm (52 scfm)
  • Vacuum to 1,700 psig (117 bar) inlet
    FC Option – vacuum to 300 psig (21 bar) inlet
    HR Option – vacuum to 3,000 psig (207 bar) inlet
  • Point of use and source cylinder applications
Operating Parameters:
Source pressure   AP 1200vacuum to 1,700 psig (117 bar)
AP 1200 HF
vacuum to 1,700 psig (117 bar)
AP 1215
vacuum to 1000 psig (69 bar)
AP 1200 FC
vacuum to 300 psig (21 bar)
AP 1200 HR
vacuum to 3,000 psig (207 bar)
Delivery pressure   AP 12021 to 30 psig (0.07 to 2 bar)
(not available for FC or HR)
AP 1206
1 to 60 psig (0.07 to 4 bar)
(not available for FC or HR)
AP 1210
2 to 100 psig (0.14 to 7 bar)
AP 1215
5 to 150 psig (0.34 to 10 bar)
AP 1225*
Preset to 250 psig (17 bar) at 800 psig Inlet
(not available for FC or HR)
Proof pressure2,550 psig (176 bar)
Burst pressure8,000 psig (552 bar)

Other Parameters:
Inlet/outlet connectors1/4, 3/8, 1/2, 3/4 inch face seal or tube weld
Bonnet port1/8 inch NPT
Flow coefficient(Cv) 0.9 (HF = 1.1 and FC = 0.65)
Internal volume1.07 in3 (17.6 cm3)
Operating temperature-40° to +160°F (-40° to +71°C)
Surface finish15 µin. (0.4 µm) Ra max standard;
10 µin (0.25 µm); 7 µin (0.18 µm); and 5 µin (0.13 µm) optional
Inboard leakage2 x 10-10 sccs
Outboard leakage2 x 10-9 sccs He at 1,500 psig inlet pressure
Leakage across seat4 x 10-8 sccs He at 1,000 psig inlet pressure
Installationsurface or panel (optional)
Delivery pressure rise3.5 psig per 100 psig source pressure drop
HF & FC4.2 psig per 100 psig source pressure drop



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