Diaphragm Valves
Pressure Regulators
Positive Shut-off AP 1400T
Springless Pressure Regulators
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Positive Shut-off Pressure Regulator
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Series AP 1400T
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Features:
- Single stage
- Stainless steel 316L VAR
secondary remelt
construction
- Absolute sub-atmospheric
option, flow rate to
6 slpm
- Cylinder or point of use
specialty and bulk gases
- Flow rates to 600 slpm
(21 scfm)
- Vacuum to 2,300 psig
(158 bar) inlet
- Designed and
manufactured exclusively
for UHP semiconductor
applications
Operating Parameters
| Source pressure AP 1400T | | vacuum to 2,300 psig (159 bar) |
AP 1400TA | | vacuum to 300 psig (21 bar) |
| Delivery pressure AP 1402TA | | 100 mm Hg absolute to 30 psig (2 bar) |
AP 1402T | | 1 to 30 psig (0.07 to 2 bar) |
AP 1406T | | 1 to 60 psig (0.07 to 4 bar) |
AP 1410T | | 2 to 100 psig (0.14 to 7 bar) |
| Proof pressure | | 4,000 psig (276 bar) |
| Burst pressure | | 8,000 psig (552 bar) |
Other Parameters
| Inlet/outlet connectors | | 1/4, 3/8 or 1/2 inch face seal or tube weld |
| Bonnet port | | 1/8 inch NPT |
| Flow coefficient | | 0.45 |
| Internal volume | | 1.06 in3 (17.4 cm3) |
| Operating temperature | | -40° to +160°F (-40° to +71°C)* |
| Surface finish | | 15 µin. (0.4 µm) Ra max standard;
10 µin (0.25 µm); 7 µin (0.18 µm); and 5 µin (0.13 µm) optional |
| Inboard leakage | | 2 x 10-10 sccs |
| Outboard leakage | | 2 x 10-9 sccs He at 1,500 psig inlet pressure |
| Leakage across seat | | 4 x 10-8 sccs He at 1,000 psig inlet pressure |
| Delivery pressure rise | | 1.6 psig per 100 psig source pressure drop |
| Installation | | surface or panel (optional) |
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Biotechnology Industry
