Diaphragm Valves
Pressure Regulators
Single Stage AP 1600
Springless Pressure Regulators
| |
Single Stage Pressure Regulator
|
Series AP 1600
|
|
Features:
- High sensitivity
- Stainless steel 316L VAR
secondary remelt
construction
- Cleaned, assembled
and packaged for high
purity semiconductor
applications
- Contamination free
- Vacuum to 3,500 psig
(241 bar) inlet
- 15 µin. max surface finish
(10, 7 and 5 µin. optional)
- Flow rates to 120 slpm
Operating Parameters
| Source pressure | | vacuum to 3,500 psig (241 bar); |
| | for AP 1601: 100 psig (7 bar) |
| Delivery pressure AP 1601 | | 1 to 10 psig (0.07 to 0.7 bar) |
AP 1602 | | 1 to 30 psig (0.07 to 2 bar) |
AP 1606 | | 2 to 60 psig (0.14 to 4 bar) |
AP 1610 | | 2 to 100 psig (0.14 to 7 bar) |
| Proof pressure | | 4,000 psig (276 bar) |
| Burst pressure | | 8,000 psig (552 bar) |
Other Parameters
| Inlet/outlet connectors | | 1/4, 3/8 or 1/2 inch face seal or tube weld |
| Bonnet port | | 1/8 inch NPT |
| Flow coefficient | | 0.13 |
| Internal volume | | 0.82 in3 (13.5 cm3) |
| Operating temperature | | -40° to +160°F (-40° to +71°C) |
| Surface finish | | 15 µin. (0.4 µm) Ra max standard;
10 µin (0.25 µm); 7 µin (0.18 µm); and 5 µin (0.13 µm) optional |
| Inboard leakage | | 2 x 10-10 sccs |
| Outboard leakage | | 2 x 10-9 sccs He at 1,500 psig inlet pressure |
| Leakage across seat | | 4 x 10-8 sccs He at 500 psig inlet pressure |
| Delivery pressure rise | | 0.25 psig per 100 psig source pressure drop |
| Installation | | surface or panel (optional) |
|
|
Biotechnology Industry
