Semiconductor Industry


   

Air Actuated Diaphragm Valve

Series AP 3000

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Features:
  • Stainless steel 316L VAR secondary remelt or Hastelloy® alloy C-22® construction
  • 15 µin. surface finish (10, 7 and 5 µin. opt)
  • Metal to metal seal to atmosphere
  • Replaceable PCTFE seat (Vespel® optional)
  • Pneumatically actuated normally closed (NC)
  • Vacuum to 3,000 psig (207 bar)
  • Multiport and monoblock configurations
  • LOTO option — PL210
Operating Parameters:
Inlet pressurevacuum to 3,000 psig (207 bar)
Outlet pressurevacuum to inlet pressure
Proof pressure4,000 psig (276 bar)
Burst pressure8,000 psig (552 bar)
Actuation pressure70 to 110 psig (4.8 to 7.6 bar)

Other Parameters:
Statusnormally closed
Inlet/outlet connectors1/4 or 3/8 inch face seal or tube weld
Actuation port1/8 inch NPT, top port
Flow coefficient (Cv)        30000.23, XT = 0.5
3002
0.28, XT = 0.5
Internal volume0.06 in3 (1.07 cm3)
Operating temperature-40° to +160°F (-40° to +71°C)
Surface finish15 µin. (0.4 µm) Ra max standard;
10 µin (0.25 µm); 7 µin (0.18 µm); and 5 µin (0.13 µm) optional
Inboard leakage2 x 10-10 sccs
Outboard leakage2 x 10-9 sccs He at 1,000 psig
Leakage across seat4 x 10-8 sccs He at 1,000 psig inlet pressure



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