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Series AP 3200 & 3260
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Features:
- Vacuum to 125 psig
(9 bar)
- Stainless steel 316L VAR
secondary remelt
- All metal wetted parts for
increased compatibility
with ClF3 and F2
- 15 µin. surface finish
(10, 7 and 5 µin. opt)
- Cleaned, assembled
and packaged for high
purity semiconductor
applications
- AP 3200 = Air actuated NC
(normally closed)
- AP 3260 = Manual,
multi turn
- All metal, no wetted
plastic or polymer
Operating Parameters - all valves:
| Inlet pressure | | vacuum to 125 psig (9 bar) |
| Outlet pressure | | vacuum to inlet pressure |
| Proof pressure | | 1,000 psig (69 bar) |
| Burst pressure | | 8,000 psig (552 bar) |
Other Parameters - all valves:
| Inlet /outlet connectors | | 1/4 or 3/8 inch face seal or tube weld |
| Flow coefficient (Cv) | | 0.27, XT = 0.7 |
| Internal volume | | 0.06 in3 (1.07 cm3) |
| Operating temperature | | -40° to +212°F (-40° to +100°C) |
| Surface finish | | 15 µin. (0.4 µm) Ra max standard;
10 µin (0.25 µm); 7 µin (0.18 µm); and 5 µin (0.13 µm) optional |
| Inboard leakage | | 2 x 10-10 sccs |
| Outboard leakage | | 2 x 10-9 sccs He at 125 psig |
| Leakage across seat | | 1 x 10-6 sccs He at 125 psig inlet pressure |
Other Parameters - AP 3200:
| Actuation port | | 1/8 inch NPT, top port |
| Actuation pressure | | 70 – 110 psig (4.8 – 8.3 bar) |
| Status | | Normally closed (NC) |
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Biotechnology Industry
