Semiconductor Industry


   

Springless Diaphragm Valves

Series AP 3540, 3550, 3580
click to enlarge
click on image to enlarge

Features:
  • Stainless steel 316L VAR secondary remelt or Hastelloy® alloy C-22® construction
  • 15 µin. surface finish (10, 7 and 5 µin. optional)
  • Metal to metal seal to atmosphere
  • LOTO, PL 210, compatible (AP 3540)
  • Replaceable PCTFE seat (Vespel® optional)
  • Pneumatically actuated normally closed or normally open
  • Surface mount, multiport or block valve (optional)
  • Cleaned, assembled and packaged for high purity semiconductor applications
Operating Parameters - all valves:
Inlet pressure                   AP 3540vacuum to 125 psig (9 bar)
AP 3550
vacuum to 250 psig (17 bar)
AP 3580
vacuum to 250 psig (17 bar)
Outlet pressurevacuum to inlet pressure
Proof pressure1,000 psig (69 bar)
Burst pressure8,000 psig (552 bar)
Actuation pressure70 to 110 psig (4.8 to 7.6 bar)

Other Parameters - all valves:
Status             AP 3540, 3550normally closed
AP 3580
normally open
Inlet /outlet connectors1/4 or 3/8 inch face seal or tube weld
Actuation port             AP 3550, 4550#10–32 thread, side port
AP 3540, 3580
1/8 inch NPT, top port
Flow coefficient AP 3540, 3550, 35800.29, XT = 0.6
Internal volume0.06 in3 (1.07 cm3)
Operating temperature-40° to +160°F (-40° to +71°C)
Surface finish15 µin. (0.4 µm) Ra max standard;
10 µin (0.25 µm); 7 µin (0.18 µm); and 5 µin (0.13 µm) optional
Inboard leakage2 x 10-10 sccs
Outboard leakage2 x 10-9 sccs He at 125 psig
Leakage across seat4 x 10-8 sccs He at 125 psig inlet pressure



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