Semiconductor Industry


   

MANUAL 1/4'' & 3/8'' SPRINGLESS DIAPHRAGM VALVE

SERIES AP 3650 & AP 4650

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Features:
  • Stainless steel 316L VAR secondary remelt or Hastelloy® alloy C-22® construction
  • 1/4 turn actuation
  • 15µ in. surface finish;
    (10, 7 and 5µ in. optional)
  • Indicating switch option for remote status monitoring
  • Metal to metal seal to atmosphere
  • Multi port, and monoblock configurations
  • Replaceable PCTFE seat (Vespel® optional)
  • Vacuum to 3,000 psig (207 bar) AP 3650 Vacuum to 250 psig (17 bar) AP 4650
Operating Parameters - all valves:
Inlet pressure                   AP 3650vacuum to 3,000 psig (207 bar)
AP 4650
vacuum to 250 psig (17 bar)
Outlet pressure                AP 3650vacuum to inlet pressure
AP 4650
vacuum to inlet pressure
Proof pressure                   AP 36504,000 psig (276 bar)
AP 4650
1,000 psig (69 bar)
Burst pressure                   AP 36508,000 psig (552 bar)
AP 4650
8,000 psig (552 bar)

Other Parameters:
Inlet /outlet connectors1/4 or 3/8 inch face seal or tube weld
Flow coefficient (Cv)  AP 36500.29, XT = 0.6
AP 4650
0.5, XT = 0.6
Internal volume0.06 in3 (1.07 cm3)
Operating temperature-40° to +160°F (-40° to +71°C)
Surface finish15 µin. (0.4 µm) Ra max standard;
10 µin (0.25 µm); 7 µin (0.18 µm); and 5 µin (0.13 µm) optional
Inboard leakage2 x 10-10 sccs
Outboard leakage2 x 10-9 sccs He at 250 psig inlet pressure
Leakage across seat4 x 10-8 sccs He at 250 psig inlet pressure



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