Diaphragm Valves
Pressure Regulators
Single Stage Line AP 500
Springless Pressure Regulators
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Single Stage Line Pressure Regulator
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Series AP 500
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Features:
- Single stage
- Stainless steel 316L VAR secondary remelt construction
- Compact size with low internal volume
- High performance with low hysteresis
- Vacuum to 150 psig (10 bar) inlet
- Surface mount (IGS)
configurations
- 15 slpm flow capacity
HF option to 30 slpm
- Designed and
manufactured exclusively
for UHP semiconductor
applications
- Sub-atmospheric to low
positive pressure delivery
Operating Parameters:
| Source pressure | | vacuum to 150 psig (10 bar) |
| Delivery pressure AP 501A | | 100 mm Hg absolute to 10 psig (0.7 bar) |
AP 502 | | 0.5 to 30 psig (0.034 to 2 bar) |
AP 510 | | 1 to 100 psig (0.07 to 7 bar) |
| Proof pressure | | 500 psig (34 bar) |
| Burst pressure | | 1,000 psig (69 bar) |
Other Parameters - all valves:
| Inlet/outlet connectors | | 1/4 or 3/8 inch face seal or tube weld |
| Flow coefficient | | (Cv) 0.06 (0.1 HF option) |
| Internal volume | | 0.15 in3 (2.4 cm3) |
| Operating temperature | | -40° to +160°F (-40° to +71°C) |
| Surface finish | | 15 µin. (0.4 µm) Ra max standard;
10 µin (0.25 µm); 7 µin (0.18 µm); and 5 µin (0.13 µm) optional |
| Inboard leakage | | 2 x 10-10 sccs |
| Outboard leakage | | 2 x 10-9 sccs He at 100 psig inlet pressure |
| Leakage across seat | | 4 x 10-8 sccs He at 100 psig inlet pressure |
| Delivery pressure rise | | 0.20 psig per 20 psig source pressure drop
(0.4 psig per 20 psig source pressure drop HF option) |
| Installation | | Surface |
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Biotechnology Industry
