Semiconductor Industry


   

Pressure Transducers

Model 205-2
for Corrosive Liquids or Gases Gauge and Absolute PSI Ranges

Applications
  • High Purity Gas Delivery Systems
  • Semiconductor Process Tools
  • Pharmaceutical & Biotech process
  • Gas Cabinets
Benefits
  • True Flow-Through Design
  • Superior Stability
  • EMI/RFI Immunity
  • High Burst Pressure
  • Bakeable to 125°C
  • 7Ra (10 Ra Max.)
  • Electropolished Surface Finish
  • Meets CE Conformance Standards

Setra’s Model 212FT transducer design is ideal for applications that require in-line monitoring of vacuum to high pressure measurement of ultra high purity gases or liquids. The key element of Setra's "Flow- Through" pressure transducer is a 1/4" diameter tube made of VAR316L stainless steel, passivated to 5 Ra (7 Ra. max.) finish. The center portion of the pressure sensing tube is slightly oval-shaped, and the outer tube ends are circular. The transition from circular to oval is smooth and gradual, thereby eliminating any obstruction to flow. This zero dead volume reduces purge time/cycles and eliminates potential particle and moisture entrapment.
A pair of insulated electrodes are attached to the oval shaped portion of the tube to sense the minute deflection caused by pressure. The pressure induced capacitance change between the electrodes is measured with a custom integrated circuit to produce a highly accurate DC signal proportional to the applied pressure. All transducers are helium leak tested to 1 x 10-9 ATM.CC/sec.
The Model 212FT is available with standard 1/4’’ inch electropolished tubing or rotatable face seal fittings.
The entire Ultra-High Purity series is based on Setra's proven capacitive sensing technology, with highly accurate and stable voltage or current output signals that are virtually EMI/ RFI immune.



© 2012 AFT B.V.
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