Semiconductor Industry


   

GasShield® Nickel and Stainless Steel GasketFilters




Fits inside 1/4" Face Seal Fittings
  • Porous Metal media are nickel or 316LSS for complete compatibility with most inert and specialty gases.
  • Allows integration of gas filter without adding length to gas system.
  • Parts-per-trillion moisture levels achievable.
  • Retains particles down to 0.003 µm.
  • Minimized total surface area.
  • All-metal, all-welded design.
  • No particulate shedding.

Nickel Specifications
Catalog NumberGSG-V4-1-NGSG-V4-3-NGSG-V4-1-2
Rated Flow1 SLPM3 SLPM20 SLPM
Retention
(at rated flow)
Greater than 99.9999999 (9 log) removal of all
particles down to 0.003; µm confirmed at the
most penetrating particle size of 0.08 µm.
0.4 µm nominal
MaterialNickelNickelNickel
Face Seal Gasket Size1/4 inch1/4 inch1/4 inch
Element Length (nominal)1 inch3 inch1 inch
Maximum Differential
Pressure (20°C)
1000 psid
Forward or Reverse
1000 psid
Forward or Reverse
1000 psid
Forward or Reverse
Maximum Recommended
Operating Temperature
450°C (Inert Gas)450°C (Inert Gas)450°C (Inert Gas)
Changeout IntervalSystem DependentSystem DependentSystem Dependent

Stainless Steel Specifications
Catalog NumberGSG-V4-1-SGSG-V4-3-SGSG-V4-1-2S
Rated Flow1 SLPM3 SLPM20 SLPM
Retention
(at rated flow)
Greater than 99.9999999 (9 log) removal of all
particles down to 0.003; µm confirmed at the
most penetrating particle size of 0.08 µm.
0.4 µm nominal
Material316LSS316LSS316LSS
Face Seal Gasket Size1/4 inch1/4 inch1/4 inch
Element Length (nominal)1 inch3 inch1 inch
Maximum Differential
Pressure (20°C)
1000 psid
Forward or Reverse
1000 psid
Forward or Reverse
1000 psid
Forward or Reverse
Maximum Recommended
Operating Temperature
450°C (Inert Gas)450°C (Inert Gas)450°C (Inert Gas)
Changeout IntervalSystem DependentSystem DependentSystem Dependent

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