POU Gas Purifier (Heated Getters)
POU Gas Purifier (Ambient)
House & Area Gas Purifier
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Clean Dry Air Ambient Temperature Purification
MicroTorr ambient temperature gas purifiers are designed to remvoe impurities from many different gases, including nitrogen, rare gases, bydrogen, ammonia, arsine and phosphine, HCl, and many others. Impurities in these gases are reduced to less than 1 part-per-billion, in most cases.
Model Number Configuration
(Example MC1-202FV)
| MC1 |
-202 |
-FV |
| Model Size |
Media |
Options |
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Clean Dry Air
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Model Size
| Model |
Nominal Flow(1) |
Max Flow(1) |
Max PSIG |
Specifications |
| MC1 |
0.5 slpm |
5 slpm |
1000 psig |
 Datasheet |
| MC50 |
1.5 slpm |
10 slpm |
1000 psig |
Datasheet |
| MC190 |
5 slpm |
50 slpm |
250 psig |
Datasheet |
| MC200 |
5 slpm |
50 slpm |
250 psig |
Datasheet |
| MC400 |
9 slpm |
60 slpm |
250 psig |
Datasheet |
| MC450 |
10 slpm |
75 slpm |
250 psig |
Datasheet |
| MC500 |
12 slpm |
100 slpm |
250 psig |
Datasheet |
| MC1500 |
40 slpm |
250 slpm |
250 psig |
Datasheet |
| MC3000 |
80 slpm |
500 slpm |
250 psig |
Datasheet |
| MC4500 |
200 slpm |
1000 slpm |
250 psig |
Datasheet |
| MC9000 |
300 slpm |
1000 slpm |
250 psig |
Datasheet |
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| HP190
|
5 slpm |
50 slpm |
1000 psig |
Datasheet |
| HP400 |
9 slpm |
60 slpm |
1000 psig |
Datasheet |
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| SP70 |
1.5 slpm |
20 slpm (2) |
3000 psig |
Datasheet |
| SP300 |
10 slpm |
100 slpm (2) |
3000 psig |
Datasheet |
| SP600 |
15 slpm |
200 slpm (2) |
3000 psig |
Datasheet |
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| PG1 |
10 slpm |
15 slpm
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250 psig
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Datasheet |
(1) Flowrates stated without optional filters or valves
(2) Max flowrate increases between 2,000 - 3.000 psig (see specification)
Media Types for Clean Dry Air
| Media |
Gases Purified |
Impurities Removed |
Outlet Performance |
| 202 |
CDA |
H2O |
< 1 ppb |
| 203 |
CDA |
H2O, CO2, Acids, Bases, Organics, Refractory Compounds(4) |
< 10 ppt
H2O, CO2 < 100 ppt |
| 205(3) |
CDA |
H2O, CO2 |
< 1 ppb
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| 403 |
CDA |
Acids, Bases, Organics, Refractory Compounds |
< 1 ppb
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| 903(4) |
CDA |
O2, H2O, CO, CO2, H2, Acids, Bases, Organics, Refractory Compounds* |
< 10 ppt
O2, H2O, CO, CO2, H2 < 100 ppt |
(3) Not available with all models.
(4) Not available for SP models.
Options
| Option |
Description |
Comments |
| F |
0.003 µm filter option |
2 µm filter standard |
| HF |
0.003 µm high-flow filter option |
For use with MC4500 model only |
| V |
Inlet and outlet valves |
1/4" Manual diaphragm. (Not available on SP models.) |
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