Semiconductor Industry

POU Gas Purifier (Heated Getters)
GC50 PS2
MonoTorr PS3
MonoTorr PS4
MonoTorr High Flow PS4
MonoTorr PS15
POU Gas Purifier (Ambient)
MicroTorr Inline
FaciliTorr Weld/Purge Gas
House & Area Gas Purifier
MegaTorr Process Flow
MegaTorr PS5 Rare Gas
MegaTorr PS6 Oxygen
MegaTorr PS7 Hydrogen Getter/Adsorber
MegaTorr PS7 Hydrogen Getter Only
MegaTorr Hydrogen PS7 Adsorber Only
MegaTorr PS8 Nitrogen & Inert Gas
MegaTorr PS9 N2/Inert w/CH4 Removal
MegaTorr PS14 Ambient Gas Dryers/Purifiers
OPAL - All Weather Outdoor Enclosures

MicroContamination Collection Service

   


Ammonia and Dimethylhydrazine Gas Ambient Temperature Purification
Impurities removed include H2O, O2, and CO2. Impurities in these gases are reduced to less than 1 part-per-billion, in most cases.


Model Number Configuration
(Example MC1-702FV)
MC1 -702 -FV
Model Size Media Options

Rare Gases & Nitrogen
Hydrogen
Corrosive & Specialty Gases
Ammonia & DMHz
Arsine
Phosphine
Clean Dry Air
CO2, C2H2
Weld/Purge Gas
Dryers

Model Size
Model Nominal Flow(1) Max Flow(1) Max PSIG Specifications
MC1 0.5 slpm 5 slpm 1000 psig Datasheet
MC50 1.5 slpm 10 slpm 1000 psig Datasheet
MC190 5 slpm 50 slpm 250 psig Datasheet
MC200 5 slpm 50 slpm 250 psig Datasheet
MC400 9 slpm 60 slpm 250 psig Datasheet
MC450 10 slpm 75 slpm 250 psig Datasheet
MC500 12 slpm 100 slpm 250 psig Datasheet
MC1500 40 slpm 250 slpm 250 psig Datasheet
MC3000 80 slpm 500 slpm 250 psig Datasheet
MC4500 200 slpm 1000 slpm 250 psig Datasheet
MC9000 300 slpm 1000 slpm 250 psig Datasheet
HP190 5 slpm 50 slpm 1000 psig Datasheet
HP400 9 slpm 60 slpm 1000 psig Datasheet
PG1 10 slpm 15 slpm 250 psig Datasheet
(1) Flowrates stated without optional filters or valves

Media Types for
Media Gases Purified Impurities Removed Outlet Performance
702 NH3, DMHz H2O, O2, CO2 < 1 ppb

Options
Option Description Comments
F 0.003 µm filter option 2 µm filter standard
HF 0.003 µm high-flow filter option For use with MC4500 model only
V Inlet and outlet valves 1/4" Manual diaphragm. (Not available on SP models.)

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