Semiconductor Industry

POU Gas Purifier (Heated Getters)
GC50 PS2
MonoTorr PS3
MonoTorr PS4
MonoTorr High Flow PS4
MonoTorr PS15
POU Gas Purifier (Ambient)
MicroTorr Inline
FaciliTorr Weld/Purge Gas
House & Area Gas Purifier
MegaTorr Process Flow
MegaTorr PS5 Rare Gas
MegaTorr PS6 Oxygen
MegaTorr PS7 Hydrogen Getter/Adsorber
MegaTorr PS7 Hydrogen Getter Only
MegaTorr Hydrogen PS7 Adsorber Only
MegaTorr PS8 Nitrogen & Inert Gas
MegaTorr PS9 N2/Inert w/CH4 Removal
MegaTorr PS14 Ambient Gas Dryers/Purifiers
OPAL - All Weather Outdoor Enclosures

MicroContamination Collection Service

   

MonoTorr Phase II 3000 & 15000 Gas Purifier

MonoTorr Phase II Gas Purifier
Research has shown that point-of-use gas purification ensures consistent and repeatable process performance. Purification isolates critical process areas from house gas distribution systems and protects against gas purity upsets and cross-contamination. Purifiers from SAES provide 99.9999999% purity, which is better than gas from cylinder or liquid sources. MonoTorr Phase II heated getter purifiers provide the most complete removal of impurities for rare gases, nitrogen and hydrogen. Metal getter technology based on zirconium metals form irreversible chemical bonds to remove all oxide, carbide and nitride impurities. MonoTorr is the only purifier technology capable of removing all hydrocarbons and nitrogen from argon and helium.
Gas purity guarantees are reflected in the chart below.
Other key features:
  • Integral inlet/outlet valves and automatic bypass
  • Microprocessor control provides added safety and automation
  • Protection from exposure to air or oxygen via proprietary safety system
  • Patented Life Status Sensor provides early warning for impending breakthrough of impurities
  • Replaceable getter cartridge for fast, easy maintenance
Ordering Information
Part NumberDescriptionPower
Phase II, 3000
PS4-MT3-R-1Rare Gas Purifier110-120V
PS4-MT3-N-1Nitrogen Purifier110-120V
PS4-MT3-H-1Hydrogen Purifier110-120V
PS4-MT3-R-2Rare Gas Purifier220-240V
PS4-MT3-N-2Nitrogen Purifier220-240V
PS4-MT3-H-2Hydrogen Purifier220-240V
Phase II, 15000
PS4-MT15-R-1Rare Gas Purifier110-120V
PS4-MT15-N-1Nitrogen Purifier110-120V
PS4-MT15-H-1Hydrogen Purifier110-120V
PS4-MT15-R-2Rare Gas Purifier220-240V
PS4-MT15-N-2Nitrogen Purifier220-240V
PS4-MT15-H-2Hydrogen Purifier220-240V
Options
PS4-APIMSAPIMS cerification to 1 ppb
Spare Parts(Replacement cartridges are field replaceable)
PF4-C3-R-1Rare Gas 3000 Cartridge110-120V
PF4-C3-N-1Nitrogen 3000 Cartridge110-120V
PF4-C3-H-1Hydrogen 3000 Cartridge110-120V
PF4-C3-R-2Rare Gas 3000 Cartridge220-240V
PF4-C3-N-2Nitrogen 3000 Cartridge220-240V
PF4-C3-H-2Hydrogen 3000 Cartridge220-240V
PF4-C15-R-1Rare Gas 15000 Cartridge110-120V
PF4-C15-N-1Nitrogen 15000 Cartridge110-120V
PF4-C15-H-1Hydrogen 15000 Cartridge110-120V
PF4-C15-R-2Rare Gas 15000 Cartridge220-240V
PF4-C15-N-2Nitrogen 15000 Cartridge220-240V
PF4-C15-H-2Hydrogen 15000 Cartridge220-240V
Rare Gas
Nitrogen
Hydrogen
MonoTorr Phase II Performance Guarantee
Phase II 3000Phase II 15000
Inlet Impurity0-20 slpm20-50 slpmInlet Impurity0-30 slpm30-75 slpm
O2< 1 ppb< 1 ppbO2< 1 ppb< 1 ppb
H2O< 1 ppb< 1 ppbH2O< 1 ppb< 1 ppb
CO< 1 ppb< 1 ppbCO< 1 ppb< 1 ppb
CO2< 1 ppb< 1 ppbCO2< 1 ppb< 1 ppb
N2< 1 ppb< 10 ppbN2< 1 ppb< 10 ppb
H2< 1 ppb< 10 ppbH2< 1 ppb< 10 ppb
CH4< 1 ppb< 10 ppbCH4< 1 ppb< 10 ppb
Inlet Impurity0-20 slpm20-30 slpmInlet Impurity0-30 slpm30-50 slpm
O2< 1 ppb< 1 ppbO2< 1 ppb< 1 ppb
H2O< 1 ppb< 1 ppbH2O< 1 ppb< 1 ppb
CO< 1 ppb< 1 ppbCO< 1 ppb< 1 ppb
CO2< 1 ppb< 1 ppbCO2< 1 ppb< 1 ppb
N2< 1 ppb< 10 ppbN2< 1 ppb< 10 ppb
CH4< 1 ppb< 10 ppbCH4< 1 ppb< 10 ppb
Inlet Impurity0-20 slpm20-30 slpmInlet Impurity0-30 slpm30-50 slpm
O2< 1 ppb< 1 ppbO2< 1 ppb< 1 ppb
H2O< 1 ppb< 1 ppbH2O< 1 ppb< 1 ppb
CO< 1 ppb< 1 ppbCO< 1 ppb< 1 ppb
CO2< 1 ppb< 1 ppbCO2< 1 ppb< 1 ppb
N2< 1 ppb< 10 ppbN2< 1 ppb< 10 ppb
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