The MegaTorr MGT Series Rare Gas Purifiers are enhanced, optimized designs providing sub ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra High Purity piping design, advanced process material analysis, and state of the art integrated control systems to develop this new family of purifiers to meet the needs of low capital cost, high reliability and high performance.

The MGT Series Rare Gas Purifier is a getter based purifier designed specifically to provide ultra-high purity (UHP) gas for semiconductor applications. Outlet impurity levels for O2, H2O, CO, CO2, H2, CH4 and N2 are reduced to parts per trillion concentrations.

The patented getter alloy, operates at elevated temperatures to remove impurities by forming irreversible chemical bonds. Downstream of the heated getter column, hydrogen impurities are removed by a patented secondary ambient temperature getter cartridge, or Hydrogen Removal Unit (HRU).

Impurities removed by the above process are irreversibly trapped and will not be released under any circumstances when the purifier is operated within specification.