Semiconductor Industry


   

Ultra High Purity Pressure Transducers

Model 216

Applications
  • High Purity Gas Delivery Systems
  • Semiconductor Process Tools
  • Gas Cabinets
Benefits
  • Superior Stability
  • EMI/RFI Immunity Prevents False Shut Down
  • Low Dead Volume Meets Ultra-High Purity Applications
  • Meets CE Conformance Standards

Setra's Model 216 Ultra-High Purity pressure transducer is intended for vacuum to high pressure measurement of specialty gases or liquids in applications requiring low cavity volume and high performance. Its stainless steel capacitance sensing element, coupled with an IC-based circuit, assures excellent accuracy and longterm stability.
The 216's flush diaphragm design (0.003 in3) virtually eliminates cavity volume. Its onepiece face seal/diaphragm of high quality 316L VIM/VAR stainless steel is passivated to a 5 Ra (7 Ra max.) finish, and every sensor is mass spectrometer helium leak tested to 1 x 10-9 ATM.CC/sec.
The 216 is packaged in a welded stainless steel housing and has a rotatable cover for easy access to 12-turn potentiometers for fine zero and span adjustments.
The 216 Series is offered with a 0.2 to 5.2 VDC or 4-20 mA output. A bayonet connector or six-foot multi-conductor cable is provided for electrical termination.
Setra's patented variable capacitance sensor features a 316L VIM/VAR stainless steel diaphragm and an insulated electrode plate. A variable capacitor is formed between the sensor body and the electrode plate. An increase in pressure causes a slight rounding of the diaphragm, which decreases the capacitance. The change in capacitance is detected and converted to a highly accurate linear DC electric signal. Setra's unique custom integrated circuit, utilizes a patented charge balance principle and is virtually EMI/RFI immune.



© 2012 AFT B.V.
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