Semiconductor Industry


   

Ultra High Purity Pressure Transducers

Model 217

Applications
  • Modular "Block" Gas Sticks and Panels
  • High Purity Gas Delivery Systems
  • Semiconductor Process Tools
Benefits
  • Superior Stability Avoids Downtime
  • EMI/RFI Immunity Prevents False Shutdown
  • Sturdy Design Allows Trouble Free Installations
  • Meets CE Conformance Standards

Setra's Model 217 Transducer is designed for modular "Block" gas sticks and panels. The 217 is ideal for pressure measurement applications that require exceptional insensitivity to environmental extremes, such as temperature transients resulting from the flow of cold gas.
The 217 has a small swept sensor chamber for easy purgeability. All wetted parts are high quality VAR 316L SS, electropolished to 7 Ra (10 max.) finish. Every sensor is mass spectrometer helium leak tested to 1 x 10-9 atm.cc/sec.
The 217 is offered with a 5 VDC, 10 VDC or 4-20 mA output. A variety of standard electrical terminations are offered.
The top external zero and span adjustments complete this unique design for all UHP down mount applications.
Setra's patented variable capacitance sensor features a 316L stainless steel diaphragm and an insulated electrode plate. A variable capacitor is formed between the sensor body and the electrode plate. An increase in pressure causes a slight rounding of the diaphragm, which decreases the capacitance. The capacitance change is detected and converted to a highly accurate linear DC electric signal by Setra's unique custom integrated circuit, utilizing a patented charge balance principle.
Setra’s entire Ultra-High Purity series is based on Setra's proven capacitive sensing technology with highly accurate and stable voltage or current output signals that are virtually EMI/RFI immune.




© 2012 AFT B.V.
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