Semiconductor Industry


   

Ultra High Purity Flow-Through Pressure Transducers

Model 223

Applications
  • High Purity Gas Delivery Systems
  • Semiconductor Process Tools
  • Pharmaceutical & Biotech Process
  • High Pressure Liquid Chromatography
  • Gas Cabinets
Benefits
  • Superior Stability Avoids Downtime
  • EMI/RFI Immunity Prevents False Shutdown
  • Sturdy Design Allows Trouble-Free Installations
  • Minimal Torque Effect
  • High Burst Pressure Ratings
  • Easy Purgeability
  • Meets CE Conformance Standards
  • Virtually Insensitive to Thermal Transients in Flow Stream (Joule- Thomson Effect

Setra's Model 223 ultra-high purity pressure transducer is designed for the most demanding specialty gas monitoring and control applications, where construction integrity, purity and performance cannot be sacrificed.
The 223 has a small, streamlined sensor chamber for easy purgeability. The sensor is designed to provide superior mechanical and thermal stability, especially in transient temperature conditions resulting from flowing gases. Isolation of the sensing element from the pressure fitting virtually eliminates any torque effect.
This superior mechanical and thermal stability is achieved through Setra’s patented variable capacitance sensor. Its fundamentally simple design features VAR 316L SS wetted parts, electro-polished to a 7Ra (10Ra max) finish for system continuity, and an insulated electrode plate, fastened to the center of the sensor diaphragm, which forms a variable capacitor. As pressure increases or decreases, the capacitance changes. This change in capacitance is detected and converted to a linear analog signal by Setra’s unique electronic circuit. Various tube diameters are available with optional face seal fittings. Sturdy construction allows for trouble-free installation and high tolerance of system torsion and welding effects, providing confident installations.
Model 223 transducers are able to endure bakeout to 185°F (85°C), without affecting calibration. Every sensor is mass spectrometer helium leak tested to 1 x 10-9 ATM.CC/sec.
This ultra-high purity series is based on Setra's proven capacitive sensing technology and the highly accurate and stable voltage or current output signals are virtually EMI/RFI immune.




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