Semiconductor Industry


   

Springless Positive Shut-off Regulator

Sterling SL 5400
Sterling SL 5400

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Features:
  • Single stage
  • 10 µin. surface finish (7 and 5 µin. optional)
  • 316L SS VAR secondary remelt construction
  • Vacuum to 1000 psig (69 bar) inlet
  • UHP Semiconductor cleaned, assembled, tested and packaged
  • Cylinder and point of use applications
Operating Parameters:
Source pressurevacuum to 1,000 psig (69 bar)
Delivery pressure   SL 54021 to 30 psig (0.07 to 2 bar)
SL 5406
1 to 60 psig (0.07 to 4 bar)
SL 5410
2 to 100 psig (0.14 to 7 bar)
Proof pressure3,000 psig (207 bar)
Burst pressure6,000 psig (414 bar)

Other Parameters:
Inlet /outlet connectors1/4, 3/8 or 1/2 inch face seal or tube weld
Bonnet port1/8 inch NPT
Flow coefficient(Cv) 0.23
Internal volume1.2 in3 (19.7 cm3)
Operating temperature-40° to +160°F (-40° to +71°C)
Surface finish10 µin (0.25 µm) Ra max standard;
7 µin (0.18 µm); and 5 µin (0.13 µm) optional
Inboard leakage2 x 10-10 sccs
Outboard leakage2 x 10-9 sccs He at 1,000 psig inlet pressure
Leakage across seat4 x 10-8 sccs He at 1,000 psig inlet pressure
Installationsurface or panel (optional)
Delivery pressure rise1.6 psig per 100 psig source pressure drop



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