Semiconductor Industry


   

Springless Positive Shut-off Regulator

Sterling SL 5500
Sterling SL 5500

click on image to enlarge

Features:
  • Single stage
  • Hot DI cleaned and baked
  • 10 µin. surface finish (7 and 5 µin. opt)
  • Absolute to 100 psig delivery
  • Vacuum to 3,500 psig (241 bar) inlet
  • Low internal volume and surface area
  • Flow rates to 30 slpm
  • Cylinder and point of use applications
Operating Parameters:
Source pressurevacuum to 3,500 psig (241 bar)
Delivery pressure  SL 55021 to 30 psig (0.07 to 2 bar)
SL 5502A
100 mm Hg absolute to 30 psig
(100 torr to 2 bar)
SL 5506
1 to 60 psig (0.07 to 4 bar)
SL 5510
2 to 100 psig (0.14 to 7 bar)
Proof pressure5,000 psig (345 bar)
Burst pressure10,000 psig (690 bar)

Other Parameters:
Inlet /outlet connectors1/4 or 3/8 inch face seal or tube weld
Bonnet port1/8 inch NPT
Flow coefficient(Cv) 0.09
Internal volume0.55 in3 (9 cm3)
Operating temperature-40° to +160°F (-40° to +71°C)
Surface finish10 µin (0.25 µm) Ra max standard;
7 µin (0.18 µm); and 5 µin (0.13 µm) optional
Inboard leakage2 x 10-10 sccs
Outboard leakage2 x 10-9 sccs He at 1,500 psig inlet pressure
Leakage across seat4 x 10-8 sccs He at 1,000 psig inlet pressure
Installationsurface or panel (optional)
Delivery pressure rise0.25 psig per 100 psig source pressure drop



© 2012 AFT B.V.
DisclaimerImprintSitemap