Semiconductor Industry


   

Springless Positive Shut-off Line Regulator

Sterling SL 5800
Sterling SL 5800

click on image to enlarge

Features:
  • Hot DI cleaned and baked
  • 10 µin. surface finish (7 and 5 µin. optional)
  • Low internal volume and surface area
  • High flow rate applications with low delivery pressure
  • Vacuum to 300 psig (21 bar) inlet
Operating Parameters:
Source pressurevacuum to 300 psig (21 bar)
Delivery pressure      SL 58021 to 30 psig (0.07 to 2 bar)
SL 5806
1 to 60 psig (0.07 to 4 bar)
SL 5810
2 to 100 psig (0.14 to 7 bar)
Proof pressure2,000 psig (138 bar)
Burst pressure4,000 psig (276 bar)

Other Parameters:
Inlet /outlet connectors1/4, 3/8 or 1/2 inch face seal or tube weld
Bonnet port1/8 inch NPT
Flow coefficient(Cv) 0.4
Internal volume1.2 in3 (19.7 cm3)
Operating temperature-40° to +160°F (-40° to +71°C)
Surface finish10 µin (0.25 µm) Ra max standard;
7 µin (0.18 µm); and 5 µin (0.13 µm) optional
Inboard leakage2 x 10-10 sccs
Outboard leakage2 x 10-9 sccs He at 300 psig inlet pressure
Leakage across seat4 x 10-8 sccs He at 100 psig inlet pressure
Installationsurface or panel (optional)
Delivery pressure rise5 psig per 100 psig source pressure drop



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